| 谐振腔增强型红外光电探测器的反射镜的分析与优化设计 |
| 投稿时间：2009-02-17 修订日期：2009-02-24 点此下载全文 |
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| 基金项目:国家高技术研究发展计划（863计划）新材料领域(批准号：2009AA03Z413)资助的课题 |
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| 中文摘要:针对顶镜和底镜最上层厚度为二分之一中心波长的DBR反射镜，引入了现代光学薄膜技术中“虚设层”的概念，并进行了详细的理论分析和说明。用传输矩阵法推导了DBR反射镜的反射率，对其顶镜和底镜的反射率在真实器件的条件下进行计算，仿真得到了采用不同的顶层厚度的DBR反射镜的反射率及其与Si-SiO2层的对数、波长等的关系，证明了“虚设层”理论分析的正确性，对设计高性能谐振腔增强型（RCE）红外光电探测器具有指导意义。 |
| 中文关键词:谐振腔，DBR反射镜，传输矩阵 |
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| Optimized Designing and Analysis of the Reflectors in Resonant Cavity Enhanced Infrared Photodetectors |
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| Abstract:For the DBR mirror with half wavelength thickness in the top layer in top and bottom mirror, the idea of “absentee layer” in modem optical thin film technology is presented, and the theory analysis and explanation of it is also done. The reflectivity of the top and bottom mirror in real condition in the device is obtained and calculated by using matrix method. The relationship of the reflectivity, which is using different thickness in top layer of the DBR mirror, with the pairs of the Si-SiO2 layers and wavelength is simulated. And the theory of “absentee layer” is certified to be correct. The theory has great significance to design high-performance RCE Infrared photodetectors. |
| keywords:Resonant Cavity, DBR Mirror, Transfer Matrix |
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