1.电子薄膜与集成器件国家重点实验室,光电科学与工程学院,电子科技大学,四川 成都 610054;2.重庆微电子中心,重庆 401332
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1.State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China;2.Chongqing United Microelectronics Center, Chongqing 401332, China
Supported by the National Key Research and Development Program of China(2018YFE0201901);the Program for International S&T Cooperation Projects of Sichuan Province(2020YFH0108); the National Nature Science Foundation of China (61435010, 61307070, 61421002, 61704021); the Fundamental Research Funds for the Central Universities (ZYGX2019J046).
陆荣国,林瑞,沈黎明,蔡松炜,王玉姣,陈进湛,杨忠华,吕江泊,周勇,王小菊,刘永.3-