InP基HEMT的整体小凹槽偏移与电学性能的相关性
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作者单位:

1.中国科学院微电子研究所,高频高压器件与集成电路研究中心,北京 100029;2.中国科学院大学,北京100049

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TN385

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Correlation between the whole small recess offset and electrical performance of InP-based HEMTs
Author:
Affiliation:

1.High-Frequency High-Voltage Device and Integrated Circuits Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;2.University of Chinese Academy of Sciences (UCAS), Beijing 100049, China

Fund Project:

Supported by the Terahertz Multi User RF Transceiver System Development Project (Z211100004421012).

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    摘要:

    在这项工作中,我们研究了整个小凹槽偏移对 InP 高电子迁移率晶体管(HEMT)的直流和射频特性的影响。Lg=80 nm HEMT采用双凹栅极工艺制造。 我们重点关注它们的直流和射频响应,包括最大跨导(gm,max)、导通电阻(RON)、电流增益截止频率(fT)和最大振荡频率(fmax)。这些设备具有几乎相同的RON。随着整个小凹槽向源移动,gm,max会提高。然而,尽管整个小栅极凹槽向漏极移动会导致较小gm,max,但较小的栅源电容(Cgs)和较小的漏极输出电导(gds)会导致最大的fT。根据小信号建模,整个小凹槽朝向漏极的器件表现出优异的射频特性,例如fT=372 GHz和fmax=394 GHz。这一结果是通过注意调整电阻和电容寄生效应来实现的,这些寄生效应在高频响应中起着关键作用。

    Abstract:

    In this work, we investigate the impact of the whole small recess offset on DC and RF characteristics of InP high electron mobility transistors (HEMTs). Lg = 80 nm HEMTs are fabricated with a double-recessed gate process. We focus on their DC and RF responses, including the maximum transconductance (gm_max), ON-resistance (RON), current-gain cutoff frequency (fT), and maximum oscillation frequency (fmax). The devices have almost same RON. The gm_max improves as the whole small recess moves toward the source. However, a small gate to source capacitance (Cgs) and a small drain output conductance (gds) lead to the largest fT, although the whole small gate recess moves toward the drain leads to the smaller gm_max. According to the small-signal modeling, the device with the whole small recess toward drain exhibits an excellent RF characteristics, such as fT = 372 GHz and fmax = 394 GHz. This result is achieved by paying attention to adjust resistive and capacitive parasitics, which play a key role in high-frequency response.

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龚航,周福贵,封瑞泽,冯识谕,刘桐,史敬元,苏永波,金智. InP基HEMT的整体小凹槽偏移与电学性能的相关性[J].红外与毫米波学报,2025,44(1):40~45]. GONG Hang, ZHOU Fu-Gui, FENG Ruize, FENG Zhi-Yu, LIU Tong, SHI Jing-Yuan, SU Yong-Bo, JIN Zhi. Correlation between the whole small recess offset and electrical performance of InP-based HEMTs[J]. J. Infrared Millim. Waves,2025,44(1):40~45.]

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  • 收稿日期:2024-03-05
  • 最后修改日期:2024-08-05
  • 录用日期:2024-04-23
  • 在线发布日期: 2024-11-09
  • 出版日期: 2025-02-25
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