低辐射率物体红外测温的研究进展
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作者单位:

1.北京理工大学 光电学院,北京 100081;2.中国科学院云南天文台,云南 昆明 650216;3.昆明物理研究所,云南 昆明 650223

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中图分类号:

Q434.3

基金项目:

国家自然科学基金(U2241226,U1931124); 云南省基础研究计划项目(202401AT070140)


Research progress on infrared temperature measurement for low emissivity objects
Author:
Affiliation:

1.School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China;2.Yunnan Observatories, Chinese Academy of Sciences, Yunnan 650216, China;3.Kunming Institute of Physics, Yunnan 650223, China

Fund Project:

Supported by the National Natural Science Foundation of China (U2241226, U1931124), Yunnan Fundamental Research Projects (202401AT070140)

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    摘要:

    金属、光学镜面、硅晶圆等光滑物体一般具有极低的辐射率和较高的反射率,被称为低辐射率物体。微弱的低辐射率物体自身辐射会被其表面反射的环境辐射淹没。低辐射率物体的红外测温一直是红外测温领域的一个难题。随着金属冶炼、太阳望远镜热控、半导体生产等领域对低辐射率物体非接触测温需求的不断增长,人们提出了大量用于低辐射率物体的红外测温方法。文章首先阐述了低辐射率物体红外测温的难点,并将目前用于低辐射率物体的测温方法归纳为五类。然后,综述了每种测温方法的基本原理和技术路线,并详细分析了每种测温方法的优缺点。最后对低辐射率物体测温可能的发展方向进行了展望。

    Abstract:

    Smooth objects such as metals, optical mirrors, and silicon wafers generally have extremely low emissivity and high reflectivity, and are called low emissivity objects. The extremely weak radiation from low emissivity objects will be submerged by the environmental radiation reflected from their surfaces. Infrared temperature measurement of low emissivity objects has always been a challenge in the field of infrared temperature measurement. Due to the continuously growing demand for non-contact temperature measurement of low emissivity objects in fields such as metal smelting, solar telescope thermal control, and semiconductor production, a large number of infrared temperature measurement methods for low emissivity objects have been proposed. First, this paper elaborates on the difficulties of the infrared temperature measurement of low emissivity objects and summarizes the temperature measurement methods currently used for low emissivity objects into five categories. Then, the basic principles and technical routes of each temperature measurement method were summarized, and the advantages and disadvantages of each temperature measurement method were analyzed in detail. Finally, the possible development directions of temperature measurement for low emissivity objects were discussed.

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黄善杰,赵劲松,王岭雪,宋腾飞,许方宇,蔡毅.低辐射率物体红外测温的研究进展[J].红外与毫米波学报,2025,44(2):234~250]. HUANG Shan-Jie, ZHAO Jin-Song, WANG Ling-Xue, SONG Teng-Fei, XU Fang-Yu, CAI Yi. Research progress on infrared temperature measurement for low emissivity objects[J]. J. Infrared Millim. Waves,2025,44(2):234~250.]

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历史
  • 收稿日期:2024-06-23
  • 最后修改日期:2024-09-29
  • 录用日期:2024-08-12
  • 在线发布日期: 2025-02-08
  • 出版日期: 2025-04-25
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