光滑物体红外测温的研究进展
DOI:
作者:
作者单位:

1.北京理工大学 光电学院;2.昆明物理研究所;3.中国科学院云南天文台

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中图分类号:

Q434.3

基金项目:

国家自然科学基金(U2241226,U1931124);云南省基础研究计划项目(202401AT070140)


Research progress on infrared temperature measurement for smooth object
Author:
Affiliation:

1.School of Optics and Photonics,Beijing Institute of Technology,Beijing;2.Kunming Institute of Physics,Kunming City,Yunnan Province;3.Yunnan Observatories,Chinese Academy of Sciences,Kunming City,Yunnan Province

Fund Project:

National Natural Science Foundation of China (U2241226, U1931124) ; Yunnan Fundamental Research Projects (202401AT070140)

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    摘要:

    金属、光学镜面、硅晶圆等光滑物体一般具有很高的反射率和极低的辐射率,极其微弱的光滑物体辐射会被其表面反射的环境辐射完全淹没。光滑物体的红外测温一直是红外测温领域的一个难题。随着金属冶炼、太阳望远镜热控、半导体生产等领域对光滑物体非接触测温需求的不断增长,人们提出了大量用于光滑物体的红外测温方法。本文首先阐述了光滑物体红外测温的难点,并将目前用于光滑物体测温的大量测温方法归纳为五类。然后,综述了每种测温方法的基本原理和技术路线,并详细分析了每种测温方法的优缺点。最后对光滑物体测温可能的发展方向进行了展望。

    Abstract:

    Smooth objects such as metals, optical mirrors, and silicon wafers generally have high reflectivity and extremely low emissivity, and extremely weak radiation from smooth objects will be completely submerged by the environmental radiation reflected from their surfaces. The infrared temperature measurement of smooth objects has always been a challenge in the field of infrared temperature measurement. Due to the continuously growing demand for non-contact temperature measurement of smooth objects in fields such as metal smelting, solar telescope thermal control, and semiconductor production, a large number of infrared temperature measurement methods for smooth objects have been proposed. First, this paper elaborates on the difficulties of the infrared temperature measurement of smooth objects and summarizes the many temperature measurement methods currently used for smooth objects into five categories. Then, the basic principles and technical routes of each temperature measurement method were summarized, and the advantages and disadvantages of each temperature measurement method were analyzed in detail. Finally, the possible development directions of temperature measurement for smooth objects were discussed.

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  • 收稿日期:2024-06-23
  • 最后修改日期:2024-08-02
  • 录用日期:2024-08-12
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